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Vacuum Pump×アルバック／ULVAC, Inc. - メーカー・企業と製品の一覧

Vacuum Pumpの製品一覧

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Oil Rotary Vacuum Pump VD Series

Oil Rotary Vacuum Pump VD Series

This is an oil rotary vacuum pump developed as a "low noise type pump." [ULVAC]

The VD series is a motor-directly coupled oil rotary vacuum pump developed as a "low-noise type pump." It can be used for a wide range of exhaust applications, from deposition and sputtering equipment to vacuum packaging machines, serving as the core pump for creating vacuum. There is a strong demand for "quietness" in vacuum pumps to improve the working environment. The VD series is a low-noise motor-directly coupled oil rotary vacuum pump developed in response to such requests. Additionally, it is designed with maintenance in mind, making routine maintenance and inspections very easy. It can be used in a wide range of applications, from laboratories that require quietness to various production lines. 【Features】 ○ Low noise ○ Excellent maintainability ○ Stable exhaust even at high pressures near atmospheric pressure For more details, please contact us or download the catalog.

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  • Vacuum pump

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Oil Rotary Vacuum Pump VS Series

Oil Rotary Vacuum Pump VS Series

This is a motor-directly connected oil rotary vacuum pump that achieves compact size, lightweight, and low vibration. [ULVAC]

The VS series is a motor-direct oil rotary vacuum pump that achieves simplification and high speed through the adoption of a single-stage vane type (rotor type), resulting in a compact, lightweight, and low-vibration design. By significantly reducing vibrations, it alleviates the burden associated with pump installation, such as foundation work in factory buildings. Additionally, the enhancement of the oil circulation and cooling systems ensures stable exhaust performance at high intake pressures, making it suitable for a wide range of applications, including processes with frequent exhaust cycles. 【Features】 ○ Low vibration and low noise ○ Lightweight and compact ○ Excellent maintainability For more details, please contact us or download the catalog.

  • Vacuum pump

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Dry Vacuum Pump CR Series

Dry Vacuum Pump CR Series

The exhaust chamber can achieve stable exhaust over a long period without using oil and without contact. 【ULVAC】

The CR series dry vacuum pumps are air-cooled, roots-type dry vacuum pumps. They do not use oil in the exhaust chamber, and the rotor and cylinder operate without contact, allowing for stable operation over long periods. No cooling water or nitrogen gas is required, contributing to reduced running costs. 【Product Lineup】 ○ CR16A ○ CR30A ○ CR60A ○ CR300A For more details, please contact us or download the catalog.

  • Vacuum pump

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Oil Rotary Vacuum Pump PVD Series

Oil Rotary Vacuum Pump PVD Series

It is a vacuum pump with excellent ultimate pressure, suitable for a wide range of applications. 【ULVAC】

The PVD series is a compact oil rotary vacuum pump that has been a mainstay for many years, widely used by customers due to its reliability and ease of use. It is a two-stage rotary vane pump that excels in achieving low pressure, making it suitable for a wide range of applications. 【Features】 ○ Belt-driven compact oil rotary vacuum pump (rotary pump) ○ Excellent exhaust characteristics For more details, please contact us or download the catalog.

  • Vacuum pump

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YMV Series Base Unit for Mechanical Booster Pumps

YMV Series Base Unit for Mechanical Booster Pumps

Base unit for combining a mechanical booster pump and an oil rotary vacuum pump [ULVAC].

The YMV series is a frame unit designed to combine mechanical booster pumps and oil-sealed rotary vacuum pumps. Four types of frame units are available to match the pump displacement. The independent frame design emphasizes pump maintainability, making it ideal for use in production facilities. 【Lineup】 ○YMV-01A ○YMV-03A ○YMV-06A For more details, please contact us or download the catalog.

  • Vacuum pump

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Turbo Molecular Pump Exhaust Unit YTP Series

Turbo Molecular Pump Exhaust Unit YTP Series

This is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum. [ULVAC]

The YTP series is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum, using the turbo molecular pump UTM series, which employs "pivot bearings + magnetic bearings (permanent magnets)." It is available in two types: the SA type, which can be automatically evacuated with a START/STOP switch, and the manual operation M type. 【Features】 ○ Two types available: automatic operation type (YTP-SA series) and manual operation type (YTP-M series), with four selectable exhaust speeds ○ In the event of a power outage, the fore valve automatically closes and the rotary pump is automatically vented → Even after power is restored, the exhaust unit will not operate ○ The saturation vapor pressure of the fluorinated oil used in the turbo molecular pump is around 10^-11 Pa (at 20°C), making it virtually oil-free ○ The turbo molecular pump uses high-performance bearings, eliminating the need for troublesome oil changes or bearing replacements For more details, please contact us or download the catalog.

  • Vacuum pump

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G-TRAN Series Pirani Gauge

G-TRAN Series Pirani Gauge

Pirani vacuum gauge capable of measuring from 3000 Pa to 0.4 Pa [ULVAC].

The sensor unit SP1 is a Pirani vacuum gauge that can measure from 3000 Pa to 0.4 Pa, featuring an integrated measuring element WP series and circuit section. This vacuum gauge eliminates the operation and display section from conventional controllers, focusing on the minimum necessary functions, which enables "cost reduction" and "space saving." 【Specifications】 ○ LED display: Power, Error, Set Point 1/2 ○ Power supply voltage: DC 24V ± 2V, 90mA (Max.) ○ Input/output connector: D-sub-15P (M2.6 screw) ○ Body weight: 190g (excluding measuring element) ○ Accessories: 1 set of input/output connectors, 1 instruction manual For more details, please contact us or download the catalog.

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Crystal Oscillator Film Deposition Controller CRTM-9100G

Crystal Oscillator Film Deposition Controller CRTM-9100G

Quartz oscillator film deposition controller with low-rate deposition control and high-precision film thickness control [ULVAC].

The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Coating thickness gauge

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Optical Process Monitor Optius

Optical Process Monitor Optius

You can monitor the status of various plasma processes in real time. 【ULVAC】

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

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  • Other process controls

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Optical EB Gun EGP-1G

Optical EB Gun EGP-1G

This is an electron beam evaporation source for optical film deposition that reduces costs. [ULVAC]

The EGP-1G is an electron beam evaporation source for optical film deposition that keeps costs down by adopting a simple 180° beam deflection method. Furthermore, by employing a two-sided positioning structure, it has a model with high beam position reproducibility after maintenance. 【Specifications】 ○ Electron beam deflection angle: 180° ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H) excluding protrusions: 185mm×239mm×179mm ○ Weight: 11kg ○ Maximum output: 10kW For more details, please contact us or download the catalog.

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Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

No decrease in exhaust speed! Significant reduction in power consumption of dry pumps is possible. [ULVAC]

ECO-SHOCK is an attachment that significantly reduces power consumption by being installed on dry pumps. The ES4A is ideal for applications that require frequent evacuation of the loading and unloading chamber, as well as for reducing the power consumption of dry pumps with long operating times at the target pressure, such as turbo molecular pump packs. It also helps to suppress heat generation in dry pumps, thereby reducing the power consumption of air conditioning equipment. 【Features】 - Contributes to energy saving in dry pumps - Effective with volumetric transfer type dry pumps - No decrease in pumping speed across all pressure ranges - Easy to install - Reduces heat generation and power consumption of air conditioning equipment For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VD Series Ver.C

Oil Rotary Vacuum Pump VD Series Ver.C

Adopted forced oil supply method! This is a vacuum pump that can be used for a wide range of applications. [ULVAC]

The VD Series Ver.C is an oil-sealed rotary vacuum pump equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor. It features a two-stage vane design that achieves excellent ultimate pressure and has been optimized for low noise, making it suitable for a wide range of applications. One motor can accommodate a wide voltage range from 200-240V to 380-460V. The pump maintains stable exhaust speed even near atmospheric pressure, making it ideal for repeated continuous operation between atmospheric and vacuum conditions. 【Features】 ○ Equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor ○ One motor can accommodate a wide voltage range ○ Utilizes a forced lubrication system ○ Stable exhaust speed even near atmospheric pressure ○ Options available for special applications → In addition to the standard model, three variants (A specification, B specification, H specification) are available for special applications. For more details, please contact us or download the catalog.

  • Vacuum pump

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Dry Pump Energy-Saving Attachment ECO-SHOCK

Dry Pump Energy-Saving Attachment ECO-SHOCK

This is an attachment that significantly reduces the power consumption of your existing dry pump. *Please inquire about its usability. [ULVAC]

■ It is possible to significantly reduce the power consumption of dry pumps. This is particularly effective for multi-stage roots pumps. For other types of pumps, please inquire. ■ There is no decrease in exhaust speed across the entire pressure range. ■ Installation is easy.

  • Vacuum pump

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G-TRAN 1 Channel Display Unit ISG1

G-TRAN 1 Channel Display Unit ISG1

Pressure measurement display, pressure contact settings, and various operations can be easily performed, and the operating status is immediately clear. 【ULVAC】

This display is a 1-channel display compatible with the entire G-TRAN series and the CCM series. By connecting it to a measurement unit, pressure readings, pressure contact settings, and various operations can be easily performed, and the operational status can be understood at a glance. Control and measurement via remote operation are possible through the display unit. 【Features】 ○ 0-10V linear output ○ Setpoint output (3 points) ○ Input voltage is DC24V ○ Display section features easy-to-read LED ○ Compliant with CE standards For more details, please contact us or download the catalog.

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G-TRAN Series 4 Channel Display Unit IM1R1

G-TRAN Series 4 Channel Display Unit IM1R1

Up to 4 measurement units can be connected, allowing simultaneous measurement and display. 【ULVAC】

The 4-channel display unit can connect up to 4 measurement units, allowing simultaneous measurement and display. It comes standard with 8-point setpoint output and I/O communication control functions. With the linkage function between the atmospheric pressure Pirani gauge or the Pirani gauge and the ion gauge, it enables easy measurement of a wide range of pressures. 【Features】 ○ Adopts 96mm DIN size ○ Input voltage can be selected from DC24V or AC100V ○ Capable of connecting up to 4 measurement units ○ Simultaneous measurement and output for each sensor (CH1-4) ○ Linked measurement possible between IG (CH1) and PG (CH2) For more details, please contact us or download the catalog.

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